Equipped with various NSK products such as needle roller bearings and ball bearings, the transmission is energy-saving and demonstrates NSK's product capabilities in the field of new energy vehicles. Mass production of the transmission has already begun in China. At this exhibition, NSK exhibited a newly developed high-precision vertical axis platform, which can meet the requirements of next-generation semiconductor manufacturing equipment. At the same time, the well-received air bearing guide rail in the market and the positioning platform used in vacuum environment will also be exhibited. Development background With the miniaturization, miniaturization, and three-dimensional development of terminal electronic components such as smart phones and tablet computers, production equipment is also developing in the direction of high performance. Therefore, the market puts forward high requirements for positioning platforms used in equipment. performance and high precision requirements. So far, NSK has successfully developed key components required for high-performance positioning platforms. 1) 'High speed and quiet&Silent II Ball Screw', 'High Performance Ball Screw', 'Ball Screw with L1 Seal' 2) NSK Linear Way TM 'NH Series' 'NS Series' 3) High Performance Standard Bearing 'NSK HPS' high Features of precision vertical axis stage 1) Air bearings are used for vertical guidance, which can achieve flatness and repeatability of less than ±0.1μm*12) The newly developed self-weight reduction structure can realize the miniaturization of the drive motor (less than 50%)3) It can achieve the cleanliness equivalent to the highest grade 1 in the ISO standard*24) The wedge-shaped structure can realize high-precision positioning in the vertical direction*1: 0.1μm = 1/10000mm*2: The so-called ISO grade 1 refers to every cubic meter The number of 0.1μm particles in rice is less than 10. In the future, NSK will continue to provide corresponding solutions to various needs and further contribute to the development of the field of environmentally friendly industrial machinery.
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